Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation
D. Bachman, Z. Chen, R. Fedosejevs, Y. Y. Tsui, and V. Van, “Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation”, Optics Express, Vol. 21, Issue 9, pp. 11048-11056 (2013) (web)