Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation

Submitted by tzimmerl on Tue, 10/08/2019 - 19:26

D. Bachman, Z. Chen, R. Fedosejevs, Y. Y. Tsui, and V. Van, “Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation”, Optics Express, Vol. 21, Issue 9, pp. 11048-11056 (2013) (web)