Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation

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D. Bachman, Z. Chen, R. Fedosejevs, Y. Y. Tsui, and V. Van, “Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation”, Optics Express, Vol. 21, Issue 9, pp. 11048-11056 (2013) (web)